diff --git a/.azurepipelines/get-matrix.ps1 b/.azurepipelines/get-matrix.ps1
index 0e264d7bfe..f0d82221da 100644
--- a/.azurepipelines/get-matrix.ps1
+++ b/.azurepipelines/get-matrix.ps1
@@ -45,7 +45,7 @@ if ($AgentTable -eq $null -or $AgentTable.Count -eq 0)
     $agents = @{
         windows = "windows-2019"
         linux = "ubuntu-20.04"
-        mac = "macOS-10.15"
+        mac = "macOS-11"
     }
 }
 else {
diff --git a/Tests/Opc.Ua.Configuration.Tests/Opc.Ua.Configuration.Tests.csproj b/Tests/Opc.Ua.Configuration.Tests/Opc.Ua.Configuration.Tests.csproj
index 68cd41caa6..cbd34bd89d 100644
--- a/Tests/Opc.Ua.Configuration.Tests/Opc.Ua.Configuration.Tests.csproj
+++ b/Tests/Opc.Ua.Configuration.Tests/Opc.Ua.Configuration.Tests.csproj
@@ -19,7 +19,7 @@
       <PrivateAssets>all</PrivateAssets>
       <IncludeAssets>runtime; build; native; contentfiles; analyzers; buildtransitive</IncludeAssets>
     </PackageReference>
-    <PackageReference Include="BenchmarkDotNet" Version="0.13.1" />
+    <PackageReference Include="BenchmarkDotNet" Version="0.13.2" />
     <PackageReference Include="System.Runtime.InteropServices.RuntimeInformation" Version="4.3.0" />
   </ItemGroup>
 
diff --git a/Tests/Opc.Ua.PubSub.Tests/Opc.Ua.PubSub.Tests.csproj b/Tests/Opc.Ua.PubSub.Tests/Opc.Ua.PubSub.Tests.csproj
index 6e8fae0c2f..37b8a8a822 100644
--- a/Tests/Opc.Ua.PubSub.Tests/Opc.Ua.PubSub.Tests.csproj
+++ b/Tests/Opc.Ua.PubSub.Tests/Opc.Ua.PubSub.Tests.csproj
@@ -21,7 +21,7 @@
       <PrivateAssets>all</PrivateAssets>
       <IncludeAssets>runtime; build; native; contentfiles; analyzers; buildtransitive</IncludeAssets>
     </PackageReference>
-    <PackageReference Include="BenchmarkDotNet" Version="0.13.1" />
+    <PackageReference Include="BenchmarkDotNet" Version="0.13.2" />
   </ItemGroup>
   
   <ItemGroup>
diff --git a/Tests/Opc.Ua.Security.Certificates.Tests/Opc.Ua.Security.Certificates.Tests.csproj b/Tests/Opc.Ua.Security.Certificates.Tests/Opc.Ua.Security.Certificates.Tests.csproj
index 443f4f5eb0..34ca2f1ccb 100644
--- a/Tests/Opc.Ua.Security.Certificates.Tests/Opc.Ua.Security.Certificates.Tests.csproj
+++ b/Tests/Opc.Ua.Security.Certificates.Tests/Opc.Ua.Security.Certificates.Tests.csproj
@@ -35,7 +35,7 @@
       <PrivateAssets>all</PrivateAssets>
       <IncludeAssets>runtime; build; native; contentfiles; analyzers; buildtransitive</IncludeAssets>
     </PackageReference>
-    <PackageReference Include="BenchmarkDotNet" Version="0.13.1" />
+    <PackageReference Include="BenchmarkDotNet" Version="0.13.2" />
   </ItemGroup>
 
   <ItemGroup>
diff --git a/Tests/Opc.Ua.Server.Tests/Opc.Ua.Server.Tests.csproj b/Tests/Opc.Ua.Server.Tests/Opc.Ua.Server.Tests.csproj
index d885f154df..d9f6f22734 100644
--- a/Tests/Opc.Ua.Server.Tests/Opc.Ua.Server.Tests.csproj
+++ b/Tests/Opc.Ua.Server.Tests/Opc.Ua.Server.Tests.csproj
@@ -20,7 +20,7 @@
       <PrivateAssets>all</PrivateAssets>
       <IncludeAssets>runtime; build; native; contentfiles; analyzers; buildtransitive</IncludeAssets>
     </PackageReference>
-    <PackageReference Include="BenchmarkDotNet" Version="0.13.1" />
+    <PackageReference Include="BenchmarkDotNet" Version="0.13.2" />
   </ItemGroup>
   
   <ItemGroup>
diff --git a/azure-pipelines.yml b/azure-pipelines.yml
index 95c4158896..e8b8fd64f0 100644
--- a/azure-pipelines.yml
+++ b/azure-pipelines.yml
@@ -40,7 +40,7 @@ stages:
   - template: .azurepipelines/ci.yml
     parameters:
       buildoption: '-p:NoHttps=true'
-      agents: '@{ linux = "ubuntu-18.04" }'
+      agents: '@{ linux = "ubuntu-22.04" }'
 - stage: solutions
   dependsOn: []
   displayName: 'Build Solutions'
@@ -78,7 +78,7 @@ stages:
     parameters:
       configuration: Release
       framework: net6.0
-      agents: '@{ windows = "windows-2022"; linux="ubuntu-20.04"; mac = "macOS-11"}'
+      agents: '@{ windows = "windows-2022"; linux="ubuntu-22.04"; mac = "macOS-12"}'
       jobnamesuffix: net60
 - stage: testreleasepr
   dependsOn: []